MV Vacuum Inlet Traps for ALD processes can be easily customized by the user to remove all process byproducts from precursors such as TMA, TiCl, DeZ, and H2S including particulates and unreacted precursors. Available for both research and production applications, they come in sizes ranging from 4” to 16” dia. with port sizes from NW-25 to ISO-160 for protecting vacuum pumps and lines with flow rates from 25 to 2000 CFM.
Featuring interchangeable filter elements, MV Vacuum Inlet Traps for ALD processes are made of stainless steel and include the PosiTrap in 4” and 8” dia. sizes and the MultiTrap in 12” and 16”. Filters include stainless steel gauze for particles, activated charcoal for unreacted precursor adsorption, Sodasorb for acid neutralization, Sulfatreat for H2S neutralization, and Ammoiniasorb for NH3 and Amines.
